D. Zabrian, Samnur, R. Pamilianto, Zurnansyah, E.H. Sujiono
In this work, we have made the design of a spin coating instrument. Spin Coating is instrumentation to grow a thin layer of material. The design of spin coating using a brushless fan motor consists of body design, vacuum system design, electrical system, and programming system. The design of the body, vacuum mounts, wiring diagrams, and PCB path schemes were carried out using SketchUp, Fritzing, and Eagle Autodesk applications. The vacuum system consists of a vacuum pump, a vacuum hose, a vacuum holder which is connected to the capillary tube on a brushless motor. The electrical and programming system was using a main electrical device such as a power supply, LCD TFT, motor driver, and several switches and push buttons which integrated with Arduino as the main control system. The result shows that the electrical system design and integration of the Arduino Uno with the Nextion LCD TFT have been successfully carried out and the vacuum system has successfully worked on ITO Glass Substrate 2 cm x 2 cm for 10 minutes with a maximum speed of 3100 rpm. This shows that the design of the spin coating instrument has been able to operate properly. © 2024 American Institute of Physics Inc.. All rights reserved.
Materials Physics Laboratory, Physics Department, Universitas Negeri Makassar, Makassar, Indonesia; Department of Mechanical Engineering, Universitas Negeri Makassar, Makassar, Indonesia; Department of Electrical Engineering, Universitas Negeri Makassar, Makassar, Indonesia
